Title :
Equivalent electrical model for quartz vibrating gyroscope
Author :
Wang, Qingyi ; Chen, Weiping ; Yin, Liang ; Liu, Xiaowei ; Zhou, Zhiping
Author_Institution :
MEMS Center, Harbin Inst. of Technol., Harbin, China
Abstract :
Quartz vibrating gyroscope is a kind of MEMS angular rate sensor with advantages in resolution, stability, reliability, volume, weight and cost. In order to make full use of the virtues of this MEMS sensor, chip integration for the sensor becomes necessary. As the equivalent electrical model for the sensor is a prerequisite for design of its interface ASIC, the equivalent electrical model of quartz vibrating gyroscope is presented in this work. Hybrid simulation of the sensitive components and interface circuit with HSPICE is achieved by this model to improve the yield beneficially. Simulation results show that this model can realize function verification for the quartz vibrating gyroscope.
Keywords :
application specific integrated circuits; gyroscopes; microsensors; HSPICE; MEMS angular rate sensor; MEMS sensor; chip integration; equivalent electrical model; hybrid simulation; interface ASIC; quartz vibrating gyroscope; Application specific integrated circuits; Electrodes; Gyroscopes; Integrated circuit modeling; Micromechanical devices; Simulation; Vibrations; ASIC; Euqivalent electrical model; quartz vibrating gyroscope;
Conference_Titel :
Optoelectronics and Microelectronics (ICOM), 2012 International Conference on
Conference_Location :
Changchun, Jilin
Print_ISBN :
978-1-4673-2638-4
DOI :
10.1109/ICoOM.2012.6316325
