DocumentCode :
3493551
Title :
The Simulation of Integrated Tool Performance in Semiconductor Manufacturing
Author :
Mauer, John L. ; Schelasin, Roland E A
Author_Institution :
IBM Technology Products, VT
fYear :
1993
fDate :
12-15 Dec 1993
Firstpage :
814
Lastpage :
818
Keywords :
Computational modeling; Electronic equipment manufacture; Manufacturing processes; Parallel processing; Reliability engineering; Robots; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference Proceedings, 1993. Winter
Print_ISBN :
0-7803-1381-X
Type :
conf
DOI :
10.1109/WSC.1993.718324
Filename :
718324
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3493551
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