Title :
On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC
Author :
Yang, Chen ; Liu, Feng ; Ren, Tianling ; Liu, Litian ; Wang, Albert Z.
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
On-chip RF integrated inductors with Ni0.4Zn0.4 Cu0.2Fe2O4 and Y2.8Bi 0.2Fe5O12 ferrite thin-films have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit, with the data of Co7ZrO9 ferrite inductor in prior work. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RFIC
Keywords :
bismuth compounds; copper compounds; ferrite devices; magnetic thin films; nickel compounds; radiofrequency integrated circuits; spin coating; thin film inductors; yttrium compounds; zinc compounds; Ni0.4Zn0.4Cu0.2Fe2O 4; RF inductor; RFIC; Y2.8Bi0.2Fe5O12; ferrite thin-films; magnetic performance; on-chip integrated inductors; spin-coated method; Bismuth; Circuit testing; Equivalent circuits; Ferrite films; Iron; Magnetic analysis; Radio frequency; Radiofrequency integrated circuits; Thin film inductors; Zinc;
Conference_Titel :
Solid-State Device Research Conference, 2006. ESSDERC 2006. Proceeding of the 36th European
Conference_Location :
Montreux
Print_ISBN :
1-4244-0301-4
DOI :
10.1109/ESSDER.2006.307671
