Title :
The influence of dummy fills on an on-chip spiral inductor and their optimized placement scheme
Author :
Ogino, Tatsuya ; Sugimoto, Yasuhiro
Author_Institution :
Grad. Sch. of E., E., & C. Eng., Chuo Univ., Hachioji
Abstract :
A new dummy fill placement scheme which has a forbidden area in the vicinity of and underneath the inductor wires of an on-chip spiral inductor is proposed. Experimental results showed no degradation in either the Q value or the resonant frequency for the proposed scheme.
Keywords :
inductors; dummy fill placement scheme; on-chip spiral inductor; optimized placement scheme; resonant frequency; CMOS process; Capacitance; Circuits; Frequency; Inductors; Magnetic field measurement; Magnetic fields; Silicon; Spirals; Wires;
Conference_Titel :
Microwave Conference, 2008. APMC 2008. Asia-Pacific
Conference_Location :
Macau
Print_ISBN :
978-1-4244-2641-6
Electronic_ISBN :
978-1-4244-2642-3
DOI :
10.1109/APMC.2008.4958688
