MEMS phase shifters using cascaded slow-wave structures for improved impedance matching and/or phase shift

A new true time delay MEM phase shifter topology based on impedance-matched slow-wave CPW sections is presented. Experimental data for a 4.6 mm long device shows 317°/dB phase shift at 50 GHz (or 91°/mm) with S11 less than -21 dB from 1-50 GHz. In a second design, the slow wave phase shifter was additionally loaded with MEM capacitors to result in a phase shift of 257°/dB at 50 GHz, while keeping S11 below -19dB. The beams are actuated using high resistance bias lines with typical actuation voltage around 30-45V.