• DocumentCode
    349444
  • Title

    Computer studies on projected range due to few eV to keV cluster impacts

  • Author

    Yorizane, K. ; Muramoto, T. ; Yamamura, Y.

  • Author_Institution
    Okayama Univ., Japan
  • Volume
    2
  • fYear
    1999
  • fDate
    36495
  • Firstpage
    803
  • Abstract
    The time-evolutionary Monte Carlo simulation code DYACAT and the molecular dynamics simulation code have been applied to investigate the cluster effects on the projected range of (Au)55 cluster impacts on Cu targets, changing the cluster energy from 10 eV/atom to 50 keV/atom. For high-energy incidence (>10 keV/atom), the projected range of cluster atoms is nearly equal to that of monatomic ions. For low-energy incidence (<10 keV/atom), the projected range of cluster atoms is much larger than that of monatomic ions due to the clear-the-way effect. For very-low-energy incidence (<30 eV/atom), the many-body effect plays an important role in the projected range. For the monatomic ion bombardment, it prevents monatomic ions from penetrating into the solid, where it restrains one of the clear-the-way effects for the cluster impact
  • Keywords
    Monte Carlo methods; copper; energy loss of particles; gold; impurity distribution; ion implantation; ion-surface impact; metal clusters; molecular dynamics method; physics computing; 10 eV to 50 keV; Au55 cluster; Cu; Cu:Au55; DYACAT code; clear-the-way effect; cluster impacts; computer studies; high-energy incidence; low-energy incidence; many-body effect; molecular dynamics simulation code; projected range; time-evolutionary Monte Carlo simulation code; Acceleration; Amorphous materials; Argon; Atomic measurements; Computational modeling; Computer simulation; Digital audio players; Gold; Solids; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology Proceedings, 1998 International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    0-7803-4538-X
  • Type

    conf

  • DOI
    10.1109/IIT.1998.813789
  • Filename
    813789