Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

Author

Clayton, C.R. ; Monserrat, M.E. ; Halada, G.P. ; Fountzoulas, C.G. ; Hirvonen, J.K.

Author_Institution

State Univ. of New York, Stony Brook, NY, USA

Volume

2

fYear

1999

fDate

36495

Firstpage

885

Abstract

Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar⁺ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C₆H₅)₄(CH₃)₄Si₃O₂ oil onto silicon wafer substrates. The sp³/sp² bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology is also discussed

Keywords

Fourier transform spectra; X-ray photoelectron spectra; carbon; infrared spectra; ion beam assisted deposition; protective coatings; silicon; C:Si; FTIR microspectroscopy; Si; Si wafer substrates; diamond-like carbon; film morphology; hard adherent coatings; ion beam assisted deposition; oil evaporation rate; organic precursor; precursor evaporation temperature; sp³/sp² bonding ratio; tetraphenyl-tetramethyl-trisiloxane oil; valence band XPS; Amorphous silicon; Argon; Coatings; Diamond-like carbon; Friction; Ion beams; Petroleum; Substrates; Temperature; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology Proceedings, 1998 International Conference on

Conference_Location

Kyoto

Print_ISBN

0-7803-4538-X

Type

conf

DOI

10.1109/IIT.1998.813810

Filename

813810