Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings

Author

Liu, T.L. ; Guangyi Sun ; Jong Jin Kim ; Yang, Chih-Kong Ken ; Kim, Chang-Jin C. J.

Author_Institution

Mech. & Aerosp. Eng. Dept., Univ. of California, Los Angeles, Los Angeles, CA, USA

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

86

Lastpage

89

Abstract

We present a 2 cm-diameter rotary stage electrostatically actuated by ~15 V_DC. Multiple rings of an ionic liquid are used as both low-friction mechanical bearings and electric connections between the rotor and the substrate. The ring-bearing device is the first that was successfully rotated by electrostatic forces among the recent rotary devices involving a liquid bearing. Compared with the recent side-driven counterpart, the bottom-driven device of this report not only reduces the actuation voltage but also enables a reliable capacitive position sensing.

Keywords

DC motors; micromotors; electric connections; electrostatic bottom-driven rotary stage; electrostatic forces; liquid bearing; low-friction mechanical bearings; micromotors; multiple conductive liquid-ring bearings; reliable capacitive position sensing; ring-bearing device; Electrodes; Electrostatics; Liquids; Magnetic liquids; Rotors; Sensors; Stators;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474183

Filename

6474183