Title :
Visual observation of decelerated ion beam trajectories by using electronically excited molecular ions (N2+ or CO +) in IBD system
Author_Institution :
Power & Ind. Syst. R&D. Div., Hitachi Ltd., Ibaraki, Japan
Abstract :
Visible optical emission from electronically excited molecular N 2+ or CO+ ions was successfully exploited to investigate focusing properties of ion deceleration lens in our ion beam deposition (IBD) system. Yellow or blue light emission was clearly observed at the exit of the deceleration lens when N2 + or CO+ ions was decelerated from 25 keV down to 10 eV or below. The use of these molecular ions is very useful in designing a deceleration lens not only for IBD systems but also for low energy ion implantation systems for shallow junction formation
Keywords :
carbon compounds; electrostatic lenses; ion beams; ion implantation; ion optics; nitrogen; particle beam diagnostics; particle beam extraction; particle beam focusing; positive ions; 25 keV to 10 eV; CO; CO+; IBD system; N2; N2+; decelerated ion beam trajectories; electronically excited molecular ions; focusing properties; ion deceleration lens; low energy ion implantation systems; shallow junction formation; visible optical emission; Acceleration; Electrodes; Ion beams; Ion implantation; Ion sources; Lenses; Magnetic separation; Power supplies; Substrates; Voltage;
Conference_Titel :
Ion Implantation Technology Proceedings, 1998 International Conference on
Conference_Location :
Kyoto
Print_ISBN :
0-7803-4538-X
DOI :
10.1109/IIT.1998.813844
