Title :
Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles
Author :
Asadnia, Mohsen ; Kottapalli, Ajay Giri Prakash ; Shen, Zhe ; Miao, J.M. ; Barbastathis, George ; Triantafyllou, Michael S.
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
Keywords :
autonomous underwater vehicles; diaphragms; microfabrication; microsensors; piezoelectric devices; pressure sensors; sensor arrays; flexible MEMS pressure sensor array; marine vehicle; maritime vehicle; microfabrication; packaging; passive fish-like underwater sensor; piezoelectric microdiaphragm pressure sensor array; situational awareness; underwater object; underwater sensing application; zero powered MEMS pressure sensor array; Electrodes; Fabrication; Marine animals; Micromechanical devices; Sensor arrays; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474193
