High-Q integrated 3-D inductors and transformers for high frequency applications

Using a novel 3-D fabrication technology, we have demonstrated, for the first time, very high frequency and high quality factor (Q) inductors and transformers on Si substrate. On high resistivity Si, this technology achieves a quality factor of Q>60 for 1nH inductor at frequencies of 3 to 7 GHz. High efficiency high-Q transformers with coupling factors 0.6res<16 GHz). This technology is very simple and is fully compatible with Si and compound-semiconductor fabrication technologies and can be either implemented as a post-processing step or as a part of a vertical chip to inter poser packaging scheme.