DocumentCode :
3495063
Title :
High kt2×Q, multi-frequency lithium niobate resonators
Author :
Renyuan Wang ; Bhave, Sunil A. ; Bhattacharjee, Kushal
Author_Institution :
Cornell Univ., Ithaca, NY, USA
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
165
Lastpage :
168
Abstract :
This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with kt2×Q of 7%*2150=148 (IDT @ node) or resonators with very high kt2 of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.
Keywords :
interdigital transducers; lithium compounds; resonators; vacuum measurement; CMR; IDT; LiNbO3; contour-mode resonators; frequency 400 MHz to 800 MHz; high kt2×Q multifrequency lithium niobate resonators; interdigital transducer; spur-attenuated response; vacuum measurements; Band pass filters; Electrodes; Lithium niobate; Micromechanical devices; Q factor; Resonant frequency; Resonator filters;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474203
Filename :
6474203
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3495063
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