Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition

Author

Purkl, Fabian ; English, T. ; Yama, Gary ; Provine, J. ; Samarao, Ashwin K. ; Feyh, Ando ; O´Brien, Gary ; Ambacher, Oliver ; Howe, R.T. ; Kenny, Thomas W.

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

185

Lastpage

188

Abstract

We report the realization of coalescent free-standing ultra-thin (as thin as 5.5 nm) platinum layers deposited via plasma-enhanced atomic layer deposition and their characterization as an uncooled infrared detector. Such thin platinum thermistors enable a responsivity as high as 2 · 10⁷ V/WA, an estimated noise equivalent temperature difference of 163 mK and thermal time constants on the order of 1 ms.

Keywords

atomic layer deposition; bolometers; infrared detectors; platinum; thermistors; thin film sensors; Pt; coalescent freestanding ultrathin platinum layer; noise equivalent temperature difference estimation; plasma enhanced atomic layer deposition; sub-10 nanometer uncooled platinum bolometer; temperature 163 mK; thermal time constant; thin platinum thermistor; time 1 ms; uncooled infrared detector; Bolometers; Current measurement; Platinum; Thermal conductivity; Thermal sensors; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474208

Filename

6474208