Title :
MEMS spatial light modulator for phase and amplitude modulation of spectrally dispersed light
Author :
Dunayevsky, Yonathan ; Marom, Dan M.
Author_Institution :
Appl. Phys. Dept., Hebrew Univ., Jerusalem, Israel
Abstract :
We present an active MEMS mirrors array design with adjustable position. This diffractive MEMS modulator is used for independently applying amplitude attenuation and phase control along one dimension. The diffractive MEMS modulator is used for modulating spectral components of incident light, in conjunction with a fiber optic sub-system module.
Keywords :
diffractive optical elements; micro-optomechanical devices; micromirrors; optical arrays; optical fibres; phase modulation; spatial light modulators; MEMS spatial light modulator; active MEMS mirrors array design; amplitude modulation; diffractive MEMS modulator; fiber optic subsystem module; phase modulation; spectrally dispersed light; Actuators; Dispersion; Micromechanical devices; Micromirrors; Phase modulation; MEMS; Optical communication; SLM;
Conference_Titel :
Electrical and Electronics Engineers in Israel (IEEEI), 2010 IEEE 26th Convention of
Conference_Location :
Eliat
Print_ISBN :
978-1-4244-8681-6
DOI :
10.1109/EEEI.2010.5662090
