DocumentCode :
3495217
Title :
Direct-write n- and p-type graphene channel FETs
Author :
Jiyoung Chang ; Yumeng Liu ; Heo Kwang ; Byung Yang Lee ; Seung-wuk Lee ; Liwei Lin
Author_Institution :
Sch. of Dentistry, Univ. of California at San Francisco, San Francisco, CA, USA
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
201
Lastpage :
204
Abstract :
This paper presents a maskless, direct-write process to create both n- and p-type graphene channel FETs (Field Effect Transistors) on a single substrate. There are following achievements as compared with previous works: (1) direct deposition of controllable, arbitrary fiber patterns to construct graphene-based transistor, in which near-field electrospinning process is integrated to pattern the polymer fibers; (2) a maskless doping process to make both n-and/or p-type graphene on the same substrate, in which electrospun fibers serve as both the oxygen plasma etching mask and chemical doping sources, simultaneously; and As such, the demonstrated process could open up a new class of graphene-based devices for various applications.
Keywords :
electrospinning; field effect transistors; graphene; polymer fibres; semiconductor doping; sputter etching; arbitrary fiber patterns; chemical doping sources; direct-write n-type graphene channel FET; direct-write p-type graphene channel FET; electrospun fibers; field effect transistors; graphene-based transistor; maskless direct-write process; maskless doping process; near-field electrospinning process; oxygen plasma etching mask; polymer fiber pattern; Chemicals; Doping; Field effect transistors; Graphene; Optical fiber devices; Plasmas; Polymers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474212
Filename :
6474212
Link To Document :
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