Title :
Thin film BAW filters for wide bandwidth and high performance applications
Author_Institution :
TFR Technol. Inc., Bend, OR, USA
Abstract :
Thin film bulk acoustic wave (BAW) resonator based filter technology offers several options for the implementation of wide bandwidth and high performance filters for emerging wireless applications. By employing wafer scale manufacturing using IC processing techniques BAW shows potential for low cost manufacturing. This paper will give examples of high performance filters including design results using ladder and coupled resonator filters.
Keywords :
acoustic resonator filters; bulk acoustic wave devices; crystal filters; ladder filters; thin film devices; IC processing techniques; coupled resonator filters; ladder filters; stacked crystal filter; thin film BAW resonator based filter; thin film bulk acoustic wave resonator based filter; wafer scale manufacturing; wide bandwidth applications; wireless applications; Acoustic waves; Band pass filters; Bandwidth; Costs; Coupling circuits; Frequency; Manufacturing processes; Microwave filters; Resonator filters; Transistors;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1339125