DocumentCode
3495430
Title
RF switches using phase change materials
Author
Yonghyun Shim ; Hummel, Gwendolyn ; Rais-Zadeh, Mina
Author_Institution
Electr. Eng. Dept., Univ. of Michigan, Ann Arbor, MI, USA
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
237
Lastpage
240
Abstract
Phase change materials are attractive candidates for use in ohmic switches as they can be thermally transitioned between amorphous and crystalline states, showing several orders of magnitude change in resistivity. Phase change switches are fast, small form factor, and can be readily integrated with MEMS and CMOS electronics. As such, they have a great potential for implementing next-generation high-speed reconfigurable RF modules. In this paper, we report on the RF properties of germanium tellurium, a PC material, and its use in RF switching applications. Intrinsic resistance and capacitance at the ON (crystalline) and OFF (amorphous) states of a directly heated switch are compared and characterized. Other properties such as phase transition conditions, insertion loss, return loss, and power handling capability of the switch are also measured and analyzed.
Keywords
CMOS analogue integrated circuits; germanium compounds; microswitches; microwave switches; phase change materials; CMOS electronics; MEMS; PC material; RF switches; amorphous state; crystalline state; germanium tellurium; insertion loss; intrinsic capacitance; intrinsic resistance; next-generation high-speed reconfigurable RF modules; ohmic switches; phase change materials; phase change switches; phase transition condition; power handling capability; return loss; thermal transition; Electrical resistance measurement; Frequency measurement; Heating; Optical switches; Radio frequency; Resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474221
Filename
6474221
Link To Document