Title : 
A 0.7 μm linear BiCMOS/DMOS technology for mixed-signal/power applications
         
        
            Author : 
Smith, Jeffrey ; Tessmer, Alison ; Springer, Lily ; Madhani, Praful ; Erdeljac, John ; Mitros, Jozef ; Efland, Taylor ; Tsai, Chin-Yu ; Pendharkar, Sameer ; Hutter, Louis
         
        
            Author_Institution : 
Texas Instrum. Inc., Dallas, TX, USA
         
        
        
        
        
        
            Abstract : 
A 0.7 μm BiCMOS technology is described. The baseline process offers digital and analog CMOS, a variety of bipolar devices, poly resistors, poly-poly capacitors, Schottky diodes, noise isolation, and 3 levels of metal. Power DMOS transistors with 60 V (Rsp=0.90 mΩ·cm2) down to 16 V (Rsp=0.34 mΩ·cm2) performance are available as an option in the process
         
        
            Keywords : 
BiCMOS integrated circuits; integrated circuit noise; integrated circuit technology; mixed analogue-digital integrated circuits; power integrated circuits; 0.7 micron; 16 to 60 V; Schottky diodes; analog CMOS; bipolar devices; digital CMOS; linear BiCMOS/DMOS technology; mixed-signal/power applications; noise isolation; poly resistors; poly-poly capacitors; power DMOS transistors; BiCMOS integrated circuits; CMOS process; CMOS technology; Capacitors; Costs; Isolation technology; Logic; MOS devices; Noise level; Printers; Resistors; Schottky diodes; Voltage;
         
        
        
        
            Conference_Titel : 
Bipolar/BiCMOS Circuits and Technology Meeting, 1997. Proceedings of the
         
        
            Conference_Location : 
Minneapolis, MN
         
        
        
            Print_ISBN : 
0-7803-3916-9
         
        
        
            DOI : 
10.1109/BIPOL.1997.647424