Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr_0.3, Ti_0.7)O₃ (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d₃₁ of the tetra-PZT thin films have increased to 65.5 μC/Cm², 20 V, and -42 pm/V by applying AC voltage of 80 V as "wakeup" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.