Title :
Measures of quality-factor in gap-closing electrostatic resonators
Author :
Shmulevich, Shai ; Lerman, M. ; Elata, David
Author_Institution :
Fac. of Mech. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
Abstract :
We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.
Keywords :
Q-factor; electrostatic devices; microcavities; micromechanical resonators; MEMS resonators; gap-closing electrostatic resonators; logarithmic decrement; peak gain; peak sharpness; quality factor; Electrostatic measurements; Electrostatics; Frequency measurement; Mechanical variables measurement; Q factor; Q measurement; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474267
