Adaptable test-bed for characterization of micro-wineglass resonators

We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with <; 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the capabilities of the test-bed. Electrostatic excitation and capacitive detection was used to obtain the frequency response of a glass resonator showing a Q-factor of 40,000 at 14.8 kHz. Piezo-pinging was used to obtain the time domain response of a resonator, showing a 28 Hz frequency split (0.1% relative split) between the two degenerate wineglass modes (f₁ = 22036 Hz, f₂ = 22064 Hz).