Title :
A comparison between the experimental results and the thermal simulation for the fabrication of micro hot-plate
Author :
Yi, S.H. ; Park, H.C. ; Kim, B.W. ; Park, J.W. ; Sung, Y.K.
Author_Institution :
Mando R&D Center, South Korea
Abstract :
A micro hot-plate has been developed which offers a wide range temperature control between room temperature and 600°C. It can be fabricated using silicon bulk-micromachining and silicon thin film technology. The micro hot-plate consists of a thin film heater (Pt/Cr layer) combined with thermal oxide and E-Beam evaporated oxide. The membrane temperature reaches about 463°C at 180 mW, and its thermal distributions are measured by IR thermo-vision system for the first time. When we compare the experimental results with the FIDAP simulation for the first time, there were temperature differences about 80°C (higher value in simulation results). However, the response time and temperature distribution on the membrane were similar to the experimental results
Keywords :
chromium; gas sensors; infrared imaging; micromachining; microsensors; platinum; 180 mW; 20 to 600 degC; FIDAP simulation; IR thermo-vision system; Pt-Cr; bulk-micromachining; membrane temperature; micro hot-plate; response time; thermal distributions; thermal simulation; thin film heater; Biomembranes; Fabrication; Gas detectors; Heating; Pollution measurement; Silicon; Temperature distribution; Thermal conductivity; Thermal resistance; Thermal stresses;
Conference_Titel :
Semiconductor Electronics, 1996. ICSE '96. Proceedings., 1996 IEEE International Conference on
Conference_Location :
Penang
Print_ISBN :
0-7803-3388-8
DOI :
10.1109/SMELEC.1996.616486
