Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning

This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO₂ nanowires are written on a Ti surface.