Title :
Conducting Sb-doped SnO2 as gas sensor
Author :
Marlianto, Eddy ; Yahaya, Muhammad ; Salleh, Mohamad Mat
Author_Institution :
Phys. Dept., Univ. Kebangsaan, Malaysia
Abstract :
The Sb-doped SnO2 thin films have been developed for gas sensors applications. The mechanism of sensing is based on the absorption and desorption of gases on the film´s surface that change the electrical resistivity of the films. Thin films of SnO2 were prepared on the glass slide substrates by spray pyrolysis method. They are very sensitive to O2 and CO2 and less sensitive to N2 gas. The basic principles of the mechanism of action are described in detail
Keywords :
antimony; desorption; gas sensors; pyrolysis; semiconductor thin films; spray coating techniques; 2000 to 5000 angstrom; CO2; N2; O2; SnO2:Sb; absorption; desorption; electrical resistivity; gas sensor; semiconductor thin films; spray pyrolysis method; Absorption; Electric resistance; Electrical resistance measurement; Gas detectors; Gases; Resistors; Spraying; Substrates; Thin film sensors; Voltage;
Conference_Titel :
Semiconductor Electronics, 1996. ICSE '96. Proceedings., 1996 IEEE International Conference on
Conference_Location :
Penang
Print_ISBN :
0-7803-3388-8
DOI :
10.1109/SMELEC.1996.616488
