Title :
Epitaxially-encapsulated polysilicon disk resonator gyroscope
Author :
Nitzan, Sarah ; Ahn, Chong H. ; Su, T.-H. ; Li, Meng ; Ng, Eldwin Jiaqiang ; Wang, Shuhui ; Yang, Z.M. ; O´Brien, Gary ; Boser, Bernhard E. ; Kenny, Thomas W. ; Horsley, David A.
Author_Institution :
Univ. of California, Davis, Davis, CA, USA
Abstract :
We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr.
Keywords :
gyroscopes; resonators; temperature control; angle random walk; closed-loop quadrature null; dedicated electrode set; electrostatic mode-matching; epitaxially-encapsulated polysilicon disk resonator gyroscope; epitaxially-sealed polysilicon disk resonator gyro; size 0.6 mm; size 20 mum; temperature control; Electrodes; Electrostatics; Frequency response; Noise; Oscillators; Resonant frequency; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474319
