Title :
A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain
Author :
Foland, S.J. ; Jeong-Bong Lee
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
We report the design, fabrication, and characterization of a high-resolution biaxial strain sensor based on guided-mode resonance (GMR) in a two-dimensional, asymmetric titanium dioxide nanograting embedded at the surface of a polydimethylsiloxane slab. The highly-compliant strain sensing technique used in this 2D GMR sensor relies on the shifting of the reflected resonant wavelengths, demonstrating a sensitivity of 4.8 nm/percent strain (%ε), which can be detected accurately by a high resolution spectrometer, thus providing exceptionally accurate strain measurements. To the best of our knowledge, this is the first demonstration of a 2D deformable GMR device, and the first demonstration of a 2D photonic strain sensor of this kind.
Keywords :
strain measurement; strain sensors; titanium compounds; 2D GMR sensor; 2D deformable GMR device; 2D photonic strain sensor; TiO2; dual-axis strain simultaneous measurement; high resolution spectrometer; high-resolution biaxial strain sensor; highly-compliant asymmetric 2D guided-mode resonance sensor; highly-compliant strain sensing technique; polydimethylsiloxane slab surface; two-dimensional asymmetric titanium dioxide nanograting; Diffraction gratings; Gratings; Materials; Reflectivity; Sensitivity; Slabs; Strain;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474329