Monolithic composite-sensors designed and fabricated by a low-cost single-side ‘SiN/poly-Si/Al’ multi-user process-module for versatile sensing-network nodes

Author

Zao Ni ; Chen Yang ; Dehui Xu ; Hong Zhou ; Wei Zhou ; Tie Li ; Bin Xiong ; Xinxin Li

Author_Institution

State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

697

Lastpage

700

Abstract

We report a newly developed design/fabrication module with low-cost single-side `low-stress-SiN/polysilicon (poly-Si)/Al´ process for monolithic integration of composite-sensors in versatile sensing-network nodes. A `pressure + acceleration + temperature + infrared´ (PATIR) composite sensor is demonstrated, featuring a front-side surface-/bulk-micromachining process with multifunctional SiN/poly-Si/Al layers design, which is very promising for low-cost easy-to-customize sensing networks.

Keywords

aluminium; elemental semiconductors; infrared detectors; modules; pressure sensors; silicon; silicon compounds; temperature sensors; Al; PATIR composite sensor; Si; SiN; fabrication module; front-side surface-bulk-micromachining process; low-cost easy-to-customize sensing networks; low-cost single-side low-stress polysilicon process; low-cost single-side multiuser process-module design; monolithic composite-sensors; multifunctional layers design; pressure-acceleration-temperature-infrared composite sensor; versatile sensing-network nodes; Accelerometers; Fabrication; Infrared detectors; Silicon compounds; Surface treatment; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474338

Filename

6474338