Room-temperature THz imaging based on antenna-coupled MOSFET bolometer

Author

Morf, Thomas ; Klein, Bernhard ; Despont, Michel ; Drechsler, U. ; Kull, Lukas ; Corcos, Dan ; Elad, Danny ; Kaminski, N. ; Braendli, Matthias ; Menolfi, Christian ; Kossel, Marcel ; Francese, Pier Andrea ; Toifl, Thomas ; Plettemeier, Dirk

Author_Institution

IBM Res., Zurich, Switzerland

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

745

Lastpage

748

Abstract

We report on the design, fabrication and measurements of a new THz sensor concept based on an antenna-coupled MOSFET bolometer for room-temperature passive THz imaging for security and medical-diagnostic applications. The device is fabricated in a 180-nm CMOS SOI technology followed by a post-CMOS MEMS process. In this sensor, the antenna absorbing the THz electromagnetic field is directly coupled to the bolometer for maximum energy collection, whereas its design aims at minimizing its thermal mass as is necessary for fast frame rates. DC measurements before and after the MEMS process as well as thermal time constant and THz antenna measurements are presented.

Keywords

CMOS integrated circuits; MOSFET; antennas; bolometers; microsensors; silicon-on-insulator; terahertz wave detectors; terahertz wave imaging; CMOS SOI technology; THz antenna measurements; THz electromagnetic field; THz sensor fabrication; antenna-coupled MOSFET bolometer; maximum energy collection; medical-diagnostic applications; post-CMOS MEMS process; room-temperature passive THz imaging; size 180 nm; temperature 293 K to 298 K; thermal mass; thermal time constant; Decision support systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474350

Filename

6474350