Title :
Nonlinear behavior of a magnetic microactuator
Author :
Garnier, A. ; Bourouina, T. ; Fujita, H. ; Hiramoto, T. ; Orsier, E. ; Peuzin, J.-C.
Author_Institution :
CNRS, Tokyo Univ., Japan
Abstract :
Different nonlinear behaviors have been observed on magnetically actuated devices. These devices consist of 1 mm-long, 0.5 mm-wide, 15 μm-thick silicon processed microstructures, on the top of which a magnetostrictive thin film was deposited. Starting from our preliminary experimental results, we are now studying the nature of these nonlinear behaviors, which can be mechanical, magnetic or a combination of both, depending on several parameters such as the structure design shape or thin film deposition conditions
Keywords :
electromagnetic actuators; microactuators; magnetic microactuator; magnetically actuated devices; magnetostrictive thin film; nonlinear behavior; nonlinear behaviors; silicon processed microstructures; structure design shape; thin film deposition; Magnetic devices; Magnetostriction; Magnetostrictive devices; Micromagnetics; Microstructure; Semiconductor thin films; Shape; Silicon; Sputtering; Thin film devices;
Conference_Titel :
Emerging Technologies and Factory Automation, 1999. Proceedings. ETFA '99. 1999 7th IEEE International Conference on
Conference_Location :
Barcelona
Print_ISBN :
0-7803-5670-5
DOI :
10.1109/ETFA.1999.815383
