Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal cross section

Author

Guilllemet, R. ; Basset, Philippe ; Galayko, Dimitri ; Cottone, F. ; Marty, Frederic ; Bourouina, Tarik

Author_Institution

Univ. Paris-Est - ESYCOM - ESIEE Paris, Paris, France

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

817

Lastpage

820

Abstract

This paper deals with a fully batch-processed MEMS electrostatic Vibration Energy Harvster (e-VEH) having a half-power frequency bandwidth of more than 30 % thanks to the combination of electrostatic and mechanical non-linearities. The electromechanical transducer is made of bulk-silicon gap-closing interdigited combs with a trapezoidal cross section. Up to 2.2 μW have been harvested at atmospheric pressure for an external acceleration of 1 G at 150 Hz.

Keywords

energy harvesting; micromechanical devices; vibrations; batch-processed MEMS electrostatic vibration energy harvster; bulk-silicon gap-closing interdigited combs; e-VEH; electromechanical nonlinearities; frequency 150 Hz; half-power frequency bandwidth; mechanical nonlinearities; power 2.2 muW; trapezoidal cross section; wideband MEMS electrostatic vibration energy harvesters; Acceleration; Capacitance; Electrostatics; Micromechanical devices; Mobile communication; Springs; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474368

Filename

6474368