Title :
Proof mass effects on spiral electrode d33 mode piezoelectric diaphragm-based energy harvester
Author :
Zhiyuan Shen ; Shuwei Liu ; Jianmin Miao ; Lye Sun Woh ; Zhihong Wang
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting enhancement due to a proof mass were verified.
Keywords :
diaphragms; electrodes; energy harvesting; piezoelectric transducers; vibrations; optimal resistance load; proof mass effects; spiral electrode d33 mode piezoelectric diaphragm-based energy harvester; vibration energy conversion microstructure; working frequency; Acceleration; Electrodes; Energy harvesting; Resistance; Resonant frequency; Spirals; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474369