High Q and low resonant frequency micro electret energy harvester for harvesting low amplitude harmonic of vibration

Author

Liu, S.W. ; Miao, J.M. ; Lye, S.W.

Author_Institution

Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

837

Lastpage

840

Abstract

In this paper, we present the design, fabrication and testing of a micro electret power generator harvesting low frequency and low amplitude vibration sources by the aid of its high quality factor of the device. Conventional polymer, LDPE, is used as electret material in the power generator. Silicon inward S-springs with high spring constant ratios are proposed and incorporated into the device design. Resonant frequency of 97 Hz is achieved in the device testing with small volume of 0.26 cm³. High quality factor of 88.2 of the resonant system enables the power generator to output appreciable current when it harvests the low amplitude harmonic of vibration.

Keywords

electrets; energy harvesting; vibrations; LDPE; S-springs; high Q-low resonant frequency microelectret energy harvester; high quality factor; high spring constant ratios; low amplitude harmonic vibration harvesting; microelectret power generator; power generator; quality factor; resonant frequency; Electrets; Electrodes; Generators; Harmonic analysis; Resonant frequency; Springs; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474373

Filename

6474373