DocumentCode
3499535
Title
Nanoimprinted holes to immobilize microbes
Author
Kano, Takaaki ; Inaba, Takaaki ; Miki, Nobuhiko
Author_Institution
Keio Univ., Yokohama, Japan
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
963
Lastpage
964
Abstract
In this paper we demonstrate highly dense immobilization of bacteria into nanoimprinted holes. Nanoimprinting enables micro holes smaller than 2 μm in diameter with a high accuracy, which cannot be patterned using conventional UV photolithography. In our prior work, we developed a microbial reactor immobilizing bacteria into micro holes, which facilitated collection and evaluation of reaction products while the number of bacteria involved in the reaction could be quantified. However, the holes were made by photolithography and the minimum size was limited to be 3 μm in diameter. Large holes allow multiple bacteria to be immobilized in a hole, which resulted in errors in quantification. The number of bacteria immobilized in a nanoimprinted hole was found to have smaller deviation than in photolithographically formed holes. In addition, density of the immobilized bacteria was experimentally found to be largest in case of 2-μm-holes. The proposed processes will be of great help for precise evaluation of bacteria reaction.
Keywords
bioMEMS; cellular biophysics; microorganisms; nanolithography; photolithography; bacteria immobilization; conventional UV photolithography; immobilize microbes; nanoimprinted holes; nanoimprinting; size 2 mum; size 3 mum; Accuracy; Fabrication; Inductors; Lithography; Microfluidics; Microorganisms; Plasmas;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474406
Filename
6474406
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