DocumentCode
3499570
Title
Integrated micro Wobbe index meter towards on-chip energy content measurement
Author
Lotters, J.C. ; Lammerink, T.S.J. ; Pap, M.G. ; Sanders, R.G.P. ; de Boer, M.J. ; Mouris, A.J. ; Wiegerink, R.J.
Author_Institution
Bronkhorst High-Tech BV, Netherlands
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
965
Lastpage
968
Abstract
In this paper, the first step towards an on-chip energy content measurement system is presented. The system comprises an integrated micro Wobbe index meter, consisting of 2 gas inlets, a mixer, a combustion chamber, heaters, temperature sensors and an exhaust outlet. With an integrated micro Wobbe meter, the energy content of natural gas, biogas, hydrogen and other fuel gases can be measured accurately, in-line, real-time and with very little gas consumption. First measurement results have indicated the feasibility of the concept.
Keywords
energy measurement; microfabrication; microsensors; temperature measurement; temperature sensors; biogas; combustion chamber; exhaust outlet; fuel gas; gas consumption; heater; hydrogen gas; integrated microWobbe index meter; microfabrication; mixer; natural gas inlet; on-chip energy content measurement system; temperature sensor; Combustion; Fuels; Heating; Indexes; Semiconductor device measurement; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474407
Filename
6474407
Link To Document