• DocumentCode
    3499570
  • Title

    Integrated micro Wobbe index meter towards on-chip energy content measurement

  • Author

    Lotters, J.C. ; Lammerink, T.S.J. ; Pap, M.G. ; Sanders, R.G.P. ; de Boer, M.J. ; Mouris, A.J. ; Wiegerink, R.J.

  • Author_Institution
    Bronkhorst High-Tech BV, Netherlands
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    965
  • Lastpage
    968
  • Abstract
    In this paper, the first step towards an on-chip energy content measurement system is presented. The system comprises an integrated micro Wobbe index meter, consisting of 2 gas inlets, a mixer, a combustion chamber, heaters, temperature sensors and an exhaust outlet. With an integrated micro Wobbe meter, the energy content of natural gas, biogas, hydrogen and other fuel gases can be measured accurately, in-line, real-time and with very little gas consumption. First measurement results have indicated the feasibility of the concept.
  • Keywords
    energy measurement; microfabrication; microsensors; temperature measurement; temperature sensors; biogas; combustion chamber; exhaust outlet; fuel gas; gas consumption; heater; hydrogen gas; integrated microWobbe index meter; microfabrication; mixer; natural gas inlet; on-chip energy content measurement system; temperature sensor; Combustion; Fuels; Heating; Indexes; Semiconductor device measurement; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474407
  • Filename
    6474407