DocumentCode :
3499602
Title :
A 3D metallic structure array for refractive index sensing with optical vortex
Author :
Maeda, Etsuo ; Lee, Youngjoo ; Ho, Ya-Fang ; Fujikawa, S. ; Delaunay, Jean-Jacques
Author_Institution :
Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
973
Lastpage :
976
Abstract :
A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We show that the position of the dip wavelength is sensitive to change in the refractive index of the surrounding medium. Sensitivity to change in the refractive index was quantified by optical simulation and experimental measurements.
Keywords :
optical sensors; optical vortices; photolithography; refractive index measurement; sensor arrays; 3D metallic structure array; dip wavelength; high-aspect-ratio metallic fins; large-scale fabrication technique; light confinement; optical simulation; optical vortex; photolithography process; reflection spectrum; refractive index sensing; surrounding medium; three dimensional structure arrays; Arrays; Optical refraction; Optical sensors; Optical variables control; Optical vortices; Reflectivity; Refractive index;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474409
Filename :
6474409
Link To Document :
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