DocumentCode :
3499876
Title :
Integrated multi-LED array with three-dimensional polymer waveguide for optogenetics
Author :
Kwon, Kuduck ; Li, Wenyuan
Author_Institution :
Michigan State Univ., East Lansing, MI, USA
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
1017
Lastpage :
1020
Abstract :
This paper presents a three-dimensional (3-D) flexible micro light emitting diode (μ-LED) array for optogenetics. The array integrates individually addressable μ-LED chips with out-of-plane polymer-based microscale waveguides for deep brain optical stimulation. SU-8 waveguides were fabricated using a backside exposure method. A wafer-level assembly technique was demonstrated, which permits large scale, high-density system integration. The electrical, optical, and mechanical properties of the 3-D multi-LED array were characterized experimentally. This study lays the foundation to achieve a fully implantable optogenetics-based stimulator that enables high spatial resolution and precise stimulation of the target neurons.
Keywords :
bioMEMS; bioelectric phenomena; brain; cracks; genetics; lab-on-a-chip; light emitting diodes; neurophysiology; optical waveguides; polymers; SU-8 waveguides; backside exposure method; cracks; deep brain optical stimulation; electrical neural stimulation; electrical properties; fully implantable optogenetics-based stimulator; high-density system integration; mechanical properties; optical properties; out-of-plane polymer-based microscale waveguides; target neurons; three-dimensional flexible microlight emitting diode array; three-dimensional polymer waveguide; wafer-level assembly technique; Arrays; Light emitting diodes; Optical device fabrication; Optical fibers; Optical scattering; Stimulated emission;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474421
Filename :
6474421
Link To Document :
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