Endoscopic optical probes for linear and rotational scanning

Author

Weber, N. ; Zappe, H. ; Seifert, Andreas

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

1065

Lastpage

1068

Abstract

Two fully integrated optical microprobes, based on an advanced silicon optical bench (SiOB) technology, are developed for endoscopic OCT (optical coherence tomography). The probes incorporate diverse optical components and scan mechanics, such as magnetostatic micromirrors and rotating prisms, to realize linear side-looking and rotational scanning. The outer diameter of the assembled systems is below 2.75 mm allowing integration into the 3mm working channels of commercial endoscopes.

Keywords

biomedical optical imaging; elemental semiconductors; endoscopes; integrated optics; micromirrors; optical prisms; optical tomography; silicon; Si; advanced silicon optical bench technology; assembled systems; commercial endoscopes; diverse optical components; endoscopic OCT; endoscopic optical probes; fully integrated optical microprobes; linear scanning; linear side-looking; magnetostatic micromirrors; optical coherence tomography; rotating prisms; rotational scanning; scan mechanics; size 3 mm; working channels; Magnetic resonance imaging; Magnetostatics; Optical device fabrication; Optical imaging; Probes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474433

Filename

6474433