• DocumentCode
    3500444
  • Title

    [Copyright notice]

  • fYear
    2011
  • fDate
    25-27 April 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The following topics are dealt with: VLSI; nanoelectronics; PCM/SpinRAM/DRAM/RRAM; FEOL; and advanced manufacturing technology.
  • Keywords
    VLSI; electron device manufacture; nanoelectronics; random-access storage; DRAM; FEOL; PCM; RRAM; SpinRAM; VLSI; advanced manufacturing technology; nanoelectronics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems and Applications (VLSI-TSA), 2011 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1524-766X
  • Print_ISBN
    978-1-4244-8493-5
  • Type

    conf

  • DOI
    10.1109/VTSA.2011.5872203
  • Filename
    5872203