Large range versatile wireless microrobotic manipulators in microfluidic devices

This paper reports a development of wireless microrobotic manipulators in microfluidic devices (MRMF). The microrobotic agents are made of a PMN-PT and a Nickel bilayer, then integrated inside a multiport microfluidic device in which liquid is injected. The process is based on conventional batch microfabrication techniques. Process and associated design issues which are critical for the manufacturing of these devices are described. A good manipulation performance in terms of force, range and workspace-to-dimension ratio was achieved due to reduced microfluidic system dimensions. The use of the designed microrobots in microfluidic devices is demonstrated for wireless micro-bubble manipulation and microsphere cargo transportation.