Title :
Hybrid silicon microaccelerometer system with CMOS interface circuit
Author :
Salian, Arvind ; Kulah, Haluk ; Yazdi, Navid ; He, Guohong ; Najafi, Khalil
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper presents a hybrid microaccelerometer subsystem consisting of an all-silicon μg capacitive microaccelerometer and a low noise CMOS capacitive interface circuit. This accelerometer has a measured sensitivity of 1.4pF/g for a device with 2mm × 1mm proof mass and 1.4μm air gap. The calculated mechanical noise floor for the device is 0.39μg/vHz in atmosphere. The circuit has a 95dB dynamic range; a low offset of 370μV and can resolve better than 75aF. The overall sensitivity of the complete module is measured as 160mV/g with a noise floor of 3.6μV/vHz (-110dBV/vHz), indicating that the current system is capable of resolving about 20μg/vHz
Keywords :
CMOS integrated circuits; accelerometers; capacitive sensors; elemental semiconductors; integrated circuit noise; microsensors; silicon; 95 dB; 95dB dynamic range; Si; capacitive interface circuit; capacitive microaccelerometer; hybrid microaccelerometer; low noise CMOS; mechanical noise; offset 370pV; resolving capability 20μg/vHz; sensitivity; Accelerometers; Atmospheric measurements; Capacitance; Circuit noise; Circuit stability; Damping; Electrodes; Fabrication; Silicon; Temperature sensors;
Conference_Titel :
Circuits and Systems, 2000. Proceedings of the 43rd IEEE Midwest Symposium on
Conference_Location :
Lansing, MI
Print_ISBN :
0-7803-6475-9
DOI :
10.1109/MWSCAS.2000.951626
