Title :
Study on characteristics of thermal flow sensor designed by different shape model
Author :
Youngbae Jeon ; Sheng Liu
Author_Institution :
Sch. of Mech. Eng., Huazhong Univ. of Sci. & Technol., Wuhan, China
Abstract :
The present paper is focused on the characteristics study of thermal flow sensors in different shapes. Based on the thermal flow sensor design theory, a series of thermal flow sensors with different shapes were developed. Compared with the existing model, the sensitivity of the curve design was also studied through thermal analysis. The results reveal different temperature distributions in different design models. The finite element method (FEM) was also adopted to study thermal distribution of micro-electro mechanical systems (MEMS) sensor, and the result is in great agreement with that of numerical method.
Keywords :
finite element analysis; flow sensors; microsensors; temperature distribution; temperature sensors; thermal analysis; FEM; MEMS sensor; curve design sensitivity; finite element method; microelectromechanical system sensor; numerical method; shape model; temperature distributions; thermal analysis; thermal flow sensor characteristics; thermal flow sensor design theory; Abstracts; Annealing; Heating; Silicon compounds; Temperature sensors; Thermal conductivity;
Conference_Titel :
Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), 2012 13th International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4673-1682-8
Electronic_ISBN :
978-1-4673-1680-4
DOI :
10.1109/ICEPT-HDP.2012.6474699
