Title :
A brief history Vacuum Nanoelectronics, the IVNC, and the present status of the Spindt cathode
Author_Institution :
Micro Sci. Eng. Labs., SRI Int., Menlo Park, CA, USA
Abstract :
The notion of applying microfabrication technology to vacuum devices originated at MIT in the 1950´s. At the end of the decade the technology migrated to the Stanford Research Institute (now SRI Int´l), and developed over subsequent years to a technology that captured worldwide interest by the 1980´s. This interest led to first International Vacuum Microelectronics Conference (IVMC), held in Williamsburg VA in 1988. The conference (now the IVNC has been held annually ever since, with the 25th meeting being held in Jeju, Korea in 2012.
Keywords :
cathodes; microfabrication; nanoelectronics; vacuum microelectronics; IVNC; International Vacuum Microelectronics Conference; microfabrication technology; spindt cathode; vacuum devices; vacuum nanoelectronics; Arrays; Cathodes; Electron tubes; Integrated circuits; Microelectronics; Nanoelectronics; Vacuum technology; IVMC; IVNC; Spindt cathode; Vacuum Microelectronics; cold cathodes; field emission; field emitter array;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316876