Modeling and simulation of a micromachined gyroscope using differential frequency approximate match method

This paper presents design and simulation of an micromachined gyroscope using differential frequency approximate match method. This novel gyroscope structure allows it to achieve higher bandwidth than the exact frequency match method and sensitivity than near frequency match method. Simulation has been performed using ANSYS software. Results show that this gyroscope structure has higher bandwidth. And it is critical to control the sensing masses´ structures to keep their resonant frequencies near the resonant frequency of driving masses to ensure more continuous bandwidth.