Title :
A crater shape nano-crack for surface conduction electron emitters
Author :
Chen, Bangdao ; Liu, Hongzhong ; Liu, Weihua ; Li, Xin ; Ding, Yucheng ; Lu, Bingheng
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´´an Jiaotong Univ., Xi´´an, China
Abstract :
Thermal stress in multilayer thin films during a heating or freezing process can be employed to form different morphologies: wrinkles, buckles, and cracks. In this paper, a simple process based on above method is explored to induce nano-crack, which could be used as an excellent electron tunneling channel for surface conduction electron-emitter (SCE). The crack position is uplift by the buckling and delaminating process, and the crack size is controlled by the freezing temperature. Compared with the conventional two-dimensional SCE, the crater shape SCE constrained the electron trajectory, which led higher emission current and lower turn-on voltage.
Keywords :
buckling; delamination; electron field emission; freezing; microcracks; multilayers; surface cracks; thermal stresses; thin films; tunnelling; SCE; buckles; buckling process; crack position; crack size; crater shape SCE; crater shape nanocrack; delaminating process; electron trajectory; electron tunneling channel; emission current; freezing process; freezing temperature; heating process; multilayer thin films; surface conduction electron emitters; thermal stress; turn-on voltage; two-dimensional SCE; wrinkles; Electrodes; Films; Metals; Polymers; Strips; Substrates; Surface cracks; Crater Shape; Nano-crack; Surface Conduction Electron Emitters;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316903