DocumentCode
350497
Title
Laser-induced forward transfer: the behavior of the ablated thin film in gas phase
Author
Nakata, Y. ; Okada, T. ; Maeda, M.
Author_Institution
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
Volume
3
fYear
1999
fDate
Aug. 30 1999-Sept. 3 1999
Firstpage
688
Abstract
Laser-induced forward transfer (LIFT) is available for the fabrication of micron-sized thin films. This method has many advantages of fast deposition rate, simplicity, micron-sized pattern fabrication, and so on. Recently, a capacitor made of BaTiO/sub 3/ was fabricated by LIFT, and investigations for practical use is promoted. The film properties were investigated for different donor film thickness, laser pulse width, laser fluence and so on. On the other hand, the behavior of the ablated thin film in the gas phase, which effect the film qualities as thickness or divergence, has not been well understood. In this paper, the behavior of the ablated gold thin film on SiO/sub 2/ in LIFT process has been investigated by time-resolved imaging technique, together with the SEM photographs of the deposited films.
Keywords
gold; metallic thin films; pulsed laser deposition; Au; Au film on SiO/sub 2/; SEM photographs; SiO/sub 2/; ablated thin film; gas phase; laser-induced forward transfer; time-resolved imaging technique; Charge coupled devices; Gas lasers; Gold; Laser ablation; Laser theory; Optical films; Pulsed laser deposition; Sputtering; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on
Conference_Location
Seoul, South Korea
Print_ISBN
0-7803-5661-6
Type
conf
DOI
10.1109/CLEOPR.1999.817783
Filename
817783
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