• DocumentCode
    350497
  • Title

    Laser-induced forward transfer: the behavior of the ablated thin film in gas phase

  • Author

    Nakata, Y. ; Okada, T. ; Maeda, M.

  • Author_Institution
    Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
  • Volume
    3
  • fYear
    1999
  • fDate
    Aug. 30 1999-Sept. 3 1999
  • Firstpage
    688
  • Abstract
    Laser-induced forward transfer (LIFT) is available for the fabrication of micron-sized thin films. This method has many advantages of fast deposition rate, simplicity, micron-sized pattern fabrication, and so on. Recently, a capacitor made of BaTiO/sub 3/ was fabricated by LIFT, and investigations for practical use is promoted. The film properties were investigated for different donor film thickness, laser pulse width, laser fluence and so on. On the other hand, the behavior of the ablated thin film in the gas phase, which effect the film qualities as thickness or divergence, has not been well understood. In this paper, the behavior of the ablated gold thin film on SiO/sub 2/ in LIFT process has been investigated by time-resolved imaging technique, together with the SEM photographs of the deposited films.
  • Keywords
    gold; metallic thin films; pulsed laser deposition; Au; Au film on SiO/sub 2/; SEM photographs; SiO/sub 2/; ablated thin film; gas phase; laser-induced forward transfer; time-resolved imaging technique; Charge coupled devices; Gas lasers; Gold; Laser ablation; Laser theory; Optical films; Pulsed laser deposition; Sputtering; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on
  • Conference_Location
    Seoul, South Korea
  • Print_ISBN
    0-7803-5661-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1999.817783
  • Filename
    817783