Title :
Patterning of titanium-oxide nanostructures on glass substrate and their field emission properties
Author :
Nakatani, Takuo ; Wakaya, Fujio ; Abo, Satoshi ; Takai, Mikio
Author_Institution :
Center for Quantum Sci. & Technol. under Extreme Conditions, Osaka Univ., Toyonaka, Japan
Abstract :
A two-dimensional array of a 10-μm-diameter Ti/Au disk with a pitch of 50 μm was prepared on a glass substrate by electron-beam lithography. Titanium-oxide nanostructures were fabricated by oxidation and annealing of the array. Field-emission current was observed at an applied electric field over approximately 10 V/μm.
Keywords :
annealing; discs (structures); electron beam lithography; gold; nanofabrication; nanolithography; nanopatterning; nanostructured materials; oxidation; titanium; SiO2; Ti-Au; annealing; electric field; electron-beam lithography; field-emission current property; glass substrate; nanofabrication; nanostructure patterning; oxidation; size 10 mum; size 50 mum; two-dimensional disk array; Arrays; Electric fields; Glass; Nanowires; Substrates; Titanium; field emission; glass substrate; patterning; titanium oxide;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316920
