A thick film accelerometer based on LTCC-technology

This paper reports a thick film accelerometers based on LTCC technology. The authors introduce a LTCC compatible design and develop a fabrication process flow of this new kind of accelerometer, and moreover, samples for testing are fabricated. It is designed as a piezoresistive accelerometer, which consists of a proof mass, two parallel leaf springs, and a fixed frame. The sensing device may be embedded in the LTCC substrate. The piezoresistive signals are transmitted through LTCC multilayer interconnection and input to a DC amplifier which is surface-mounted to the substrate. The mechanical and electrical characterizations have been accomplished by simulation.