Fabrication of a glass microfluidic device integrated with ultrasonic resonators

A glass microfluidic device integrated with ultrasonic resonators prepared by a Chemical Foaming Process is presented in this paper. The fabrication of the microfluidic device including glass micro cavities and channels with ultrasonic resonators integrated was introduced firstly. By the CFP process, micro glass cavities and channels were simultaneously shaped on a glass wafer. Then, vibration tests of micro glass resonators were taken. The micro glass resonators with metal electrodes integrated on the surface was driven to vibrate by the method of electromagnetism which was in the shape of non-contact. Simulation results of the resonance properties of the spherical structure were also presented. Vibration characteristics were tested by Laser Doppler Vibrate meter.