Title :
Fabrication, laser structuring and field emission properties of carbon nanowalls
Author :
Neubert, M. ; Behrenberg, D. ; Hartmann, N. ; Buck, V. ; Serbun, P. ; Navitski, A. ; Müller, G.
Author_Institution :
Fac. of Phys. & Chem., Univ. of Duisburg-Essen & CeNIDE, Duisburg, Germany
Abstract :
We have synthesized carbon nanowalls (CNWs) on Si substrate by inductively/capacitively coupled plasma enhanced chemical vapor deposition (ICP/CCP-PECVD). The shape and density of CNWs are controlled by adjusting the synthesis parameters. Local field emission measurements of Ø 30 μm spots reproducibly yielded stable current up to 1 μA. Integral pulsed measurements results on the unstructured cathodes showed fairly homogeneous emission and current density of at least 3 mA/cm2 at 5.6 V/μm, limited by the power load on the phosphor screen. In order to get cathodes for gate controlled devices and to improve the emission homogeneity, structuring by laser was performed.
Keywords :
carbon nanotubes; cathodes; current density; electron field emission; laser materials processing; nanofabrication; phosphors; plasma CVD; CNW; ICP-CCP-PECVD; Si; carbon nanowall fabrication; cathodes; current density; field emission property; gate controlled devices; homogeneous emission; inductively-capacitively coupled plasma enhanced chemical vapor deposition; integral pulsed measurements; laser structuring; local field emission measurements; phosphor screen; carbon nanowalls; field emission; laser structuring;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316966
