DocumentCode
3506532
Title
1988 Solid State Sensor and Actuator Workshop. Technical Digest (Cat. No.88TH0215-4)
fYear
1988
fDate
6-9 June 1988
Abstract
Presents the front cover of the conference proceedings.
Keywords
detectors; electric actuators; electric sensing devices; elemental semiconductors; silicon; transducers; CMOS; VLSI sensors; accelerometers; actuators; arrays; biomedical sensors; chemical sensors; dielectric materials; gas flowmeters; high-temperature sensors; humidity sensors; interferometers; liquid-phase sensors; magnetic sensor arrays; mechanical properties of materials; microbridge; micromachining; micromechanisms; micrometers; microvalues; on-chip laser-trimming; optical fiber databases; photoresists; physical sensors; polycrystalline Si; pressure transducers; robots; solid state sensors; strain sensors; transistor noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Type
conf
DOI
10.1109/SOLSEN.1988.26417
Filename
26417
Link To Document